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Journal: Appl. Sci., 2020
Volume: 10
Number: 8496
8496
Article: Substrate Cleaning Processes and Their Influence on the Laser Resistance of Anti-Reflective Coatings
Authors: by Thomas Gischkat, Daniel Schachtler, Igor Stevanovic, Zoltan Balogh-Michels, Roelene Botha, Andreas Bächli, Marco Cucinelli, André Mocker, Martin Gutsche, Sven Günther, Philipp Alder and Bernd Eiermann
Link: https://www.mdpi.com/2076-3417/10/23/8496

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