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Journal: Appl. Sci., 2020
Volume: 10
Number: 8065
Article:
Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing
Authors:
by
Linlin Cao, Xiang Zhang, Julong Yuan, Luguang Guo, Teng Hong, Wei Hang and Yi Ma
Link:
https://www.mdpi.com/2076-3417/10/22/8065
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