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Open AccessArticle

Development of an Array of Compound Refractive Lenses for Sub-Pixel Resolution, Large Field of View, and Time-Saving in Scanning Hard X-ray Microscopy

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Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
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Institute for Photon Science and Synchrotron Radiation (IPS), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
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Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
*
Authors to whom correspondence should be addressed.
Appl. Sci. 2020, 10(12), 4132; https://doi.org/10.3390/app10124132
Received: 7 May 2020 / Revised: 7 June 2020 / Accepted: 11 June 2020 / Published: 16 June 2020
A two-dimensional array of compound refractive lenses (2D array of CRLs) designed for hard X-ray imaging with a 3.5 mm2 large field of view is presented. The array of CRLs consists of 2D polymer biconcave parabolic 34 × 34 multi-lenses fabricated via deep X-ray lithography. The developed refractive multi-lens array was applied for sub-pixel resolution scanning transmission X–ray microscopy; a raster scan with only 55 × 55 steps provides a 3.5 megapixel image. The optical element was experimentally characterized at the Diamond Light Source at 34 keV. An array of point foci with a 55 µm period and an average size of ca. 2.1 µm × 3.6 µm was achieved. In comparison with the conventional scanning transmission microscopy using one CRL, sub-pixel resolution scanning transmission hard X-ray microscopy enables a large field of view and short scanning time while keeping the high spatial resolution. View Full-Text
Keywords: two-dimensional compound refractive lens array; deep X-ray lithography; scanning transmission X-ray microscopy; sub-pixel resolution two-dimensional compound refractive lens array; deep X-ray lithography; scanning transmission X-ray microscopy; sub-pixel resolution
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Mamyrbayev, T.; Opolka, A.; Ershov, A.; Gutekunst, J.; Meyer, P.; Ikematsu, K.; Momose, A.; Last, A. Development of an Array of Compound Refractive Lenses for Sub-Pixel Resolution, Large Field of View, and Time-Saving in Scanning Hard X-ray Microscopy. Appl. Sci. 2020, 10, 4132.

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