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Journal: Actuators, 2018
Volume: 7
Number: 38
Article:
The Effects of Structure Thickness, Air Gap Thickness and Silicon Type on the Performance of a Horizontal Electrothermal MEMS Microgripper
Authors:
by
Marija Cauchi, Ivan Grech, Bertram Mallia, Pierluigi Mollicone and Nicholas Sammut
Link:
https://www.mdpi.com/2076-0825/7/3/38
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