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Review

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

by and *
Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau 999078, China
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Author to whom correspondence should be addressed.
Actuators 2018, 7(1), 5; https://doi.org/10.3390/act7010005
Received: 12 January 2018 / Revised: 6 February 2018 / Accepted: 9 February 2018 / Published: 11 February 2018
Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications. View Full-Text
Keywords: compliant mechanisms; micro-/nano-manipulation; positioning; structure optimization compliant mechanisms; micro-/nano-manipulation; positioning; structure optimization
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MDPI and ACS Style

Wu, Z.; Xu, Q. Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages. Actuators 2018, 7, 5. https://doi.org/10.3390/act7010005

AMA Style

Wu Z, Xu Q. Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages. Actuators. 2018; 7(1):5. https://doi.org/10.3390/act7010005

Chicago/Turabian Style

Wu, Zeyi, and Qingsong Xu. 2018. "Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages" Actuators 7, no. 1: 5. https://doi.org/10.3390/act7010005

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