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Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau 999078, China
Author to whom correspondence should be addressed.
Actuators 2018, 7(1), 5;
Received: 12 January 2018 / Revised: 6 February 2018 / Accepted: 9 February 2018 / Published: 11 February 2018
PDF [1136 KB, uploaded 12 February 2018]


Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications. View Full-Text
Keywords: compliant mechanisms; micro-/nano-manipulation; positioning; structure optimization compliant mechanisms; micro-/nano-manipulation; positioning; structure optimization

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Wu, Z.; Xu, Q. Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages. Actuators 2018, 7, 5.

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