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Journal: Actuators, 2021
Volume: 10
Number: 36
Article:
Piezoelectric MEMS Linear Motor for Nanopositioning Applications
Authors:
by
VÃctor Ruiz-DÃez, Jorge Hernando-GarcÃa, Javier Toledo, Abdallah Ababneh, Helmut Seidel and José Luis Sánchez-Rojas
Link:
https://www.mdpi.com/2076-0825/10/2/36
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