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Journal: Actuators, 2021
Volume: 10
Number: 36

Article: Piezoelectric MEMS Linear Motor for Nanopositioning Applications
Authors: by Víctor Ruiz-Díez, Jorge Hernando-García, Javier Toledo, Abdallah Ababneh, Helmut Seidel and José Luis Sánchez-Rojas
Link: https://www.mdpi.com/2076-0825/10/2/36

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