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Journal: Metals, 2023
Volume: 13
Number: 583

Article: Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings
Authors: by Cuicui Liu, Jian Peng, Zhigang Xu, Qiang Shen and Chuanbin Wang
Link: https://www.mdpi.com/2075-4701/13/3/583

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