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Journal: Metals, 2023
Volume: 13
Number: 165
Article:
Evolution of the Shadow Effect with Film Thickness and Substrate Conductivity on a Hemispherical Workpiece during Magnetron Sputtering
Authors:
by
Huaiyuan Liu, Donglin Ma, Yantao Li, Lina You and Yongxiang Leng
Link:
https://www.mdpi.com/2075-4701/13/1/165
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