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Journal: Metals, 2020
Volume: 10
Number: 1618
Article:
Effect of the Substrate Biasing on the Structure and Properties of Tantalum Coatings Deposited Using HiPIMS in Deep Oscillations Magnetron Sputtering Mode
Authors:
by
Fábio Ferreira, Albano Cavaleiro and João Oliveira
Link:
https://www.mdpi.com/2075-4701/10/12/1618
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