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Journal: Lubricants, 2024
Volume: 12
Number: 183
Article:
Molecular Dynamics Analysis of Adhesive Forces between Silicon Wafer and Substrate in Microarray Adhesion
Authors:
by
Shunkai Han, Yarong Chen, Ming Feng, Zhixu Zhang, Zhaopei Wang and Zhixiang Chen
Link:
https://www.mdpi.com/2075-4442/12/6/183
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