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Journal: Machines, 2022
Volume: 10
Number: 999
Article:
Study on the Preparation and Performance of Self-Regressive Fixed Abrasive Chemical Mechanical Polishing Pad
Authors:
by
Jianguo Yao, Haixu Liu, Zhankui Wang, Yongwei Zhu and Jianxiu Su
Link:
https://www.mdpi.com/2075-1702/10/11/999
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