Highly Sensitive Capacitive Pressure Sensor Based on MWCNTs/TiO₂/PDMS with a Microhemispherical Array and APTES-Modified Interface

The rapid advancement of humanoid robotics has spurred researchers’ interest in flexible sensors for wide linear range detection. In response, we report a capacitive flexible pressure sensor based on a multi-walled carbon nanotubes/titanium dioxide/polydimethylsiloxane (MWCNTs/TiO₂/PDMS) composite. A micro-hemispherical structure array formed on the composite surface via a templating method reduces the initial capacitance value. Modified carbon nanotubes (F-MWCNTs) were prepared using 2 wt%, 5 wt% and 10 wt% γ-aminopropyltriethoxysilane (APTES), significantly enhancing dispersion and interfacial bonding strength. The synergistic effect of microstructures and MWCNTs surface functionalization further enhances sensing performance. The F-MWCNTs/TiO₂/PDMS pressure sensor modified with 2 wt% APTES exhibits outstanding sensing capabilities: it demonstrates dual-stage sensitivity across a broad linear range of 0–95 kPa (0–13 kPa segment: 1.89 ± 0.49 kPa⁻¹; 13–95 kPa segment: 7.08 ± 0.63 kPa⁻¹), with a response time of 200 milliseconds, maintaining stability over 2500 cyclic loadings. In practical application exploration, this sensor has demonstrated strong adaptability, confirming its significant potential in micro-pressure detection, wearable electronics, and array sensing applications.