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Polymer-Based Device Fabrication and Applications Using Direct Laser Writing Technology

1
School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
2
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, China
3
Henan Shi-Jia Photons Technology Co., Ltd., Hebi 458030, China
4
Department of Electrical and Electronics Engineering, School of Engineering, Cardiff University, Cardiff CF10 3AT, UK
5
College of Electronic Science and Engineering, Jilin University State Key Laboratory of Integrated Optoelectronics, JLU Region, Changchun 130012, China
*
Author to whom correspondence should be addressed.
Polymers 2019, 11(3), 553; https://doi.org/10.3390/polym11030553
Received: 30 January 2019 / Revised: 11 March 2019 / Accepted: 13 March 2019 / Published: 22 March 2019
(This article belongs to the Special Issue Laser processing in polymer research)
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Abstract

Polymer materials exhibit unique properties in the fabrication of optical waveguide devices, electromagnetic devices, and bio-devices. Direct laser writing (DLW) technology is widely used for micro-structure fabrication due to its high processing precision, low cost, and no need for mask exposure. This paper reviews the latest research progresses of polymer-based micro/nano-devices fabricated using the DLW technique as well as their applications. In order to realize various device structures and functions, different manufacture parameters of DLW systems are adopted, which are also investigated in this work. The flexible use of the DLW process in various polymer-based microstructures, including optical, electronic, magnetic, and biomedical devices are reviewed together with their applications. In addition, polymer materials which are developed with unique properties for the use of DLW technology are also discussed. View Full-Text
Keywords: polymer-based laser direct writing; optical device; electromagnetics application; biology application polymer-based laser direct writing; optical device; electromagnetics application; biology application
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Wu, Z.-L.; Qi, Y.-N.; Yin, X.-J.; Yang, X.; Chen, C.-M.; Yu, J.-Y.; Yu, J.-C.; Lin, Y.-M.; Hui, F.; Liu, P.-L.; Liang, Y.-X.; Zhang, Y.; Zhao, M.-S. Polymer-Based Device Fabrication and Applications Using Direct Laser Writing Technology. Polymers 2019, 11, 553.

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