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Enduring and Stable Surface Dielectric Barrier Discharge (SDBD) Plasma Using Fluorinated Multi-Layered Polyimide

Science and Technology on Plasma Dynamics Laboratory, Air Force Engineering University, Xi’an 710038, China
Institute of Aero-engine, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Author to whom correspondence should be addressed.
Polymers 2018, 10(6), 606;
Received: 11 May 2018 / Revised: 30 May 2018 / Accepted: 31 May 2018 / Published: 2 June 2018
(This article belongs to the Special Issue Plasma Processing in Polymers)
PDF [8032 KB, uploaded 5 June 2018]


In this work, multi-layered polyimide (PI) films were surface fluorinated at 328 K and 0.05 MPa using F2/N2 mixture with 20% F2 by volume, for a fluorination time of 0, 30 and 60 min, respectively. Then, they were subjected to discharge plasma as barrier dielectrics of surface dielectric barrier discharge (SDBD) at ambient atmospheric air. The dielectric lifetime of SDBD greatly extends after 60 min surface fluorination. In addition, optical emission spectroscopy (OES) results indicate that during the plasma processing, SDBD with fluorinated PI can obtain more stable plasma parameters, including gas temperature and electron temperature. Dielectric surface properties were further evaluated by infrared thermography, scanning electron microscope (SEM), and X-ray photoelectron spectroscopy (XPS). It is considered that both physical and chemical effects lead to the extension of dielectric lifetime. The physical effect is reflected in low surface temperature and increased surface roughness, while the chemical effect is reflected in the graft of fluorine groups. View Full-Text
Keywords: surface fluorination; SDBD; discharge characteristic; multi-layered polyimide surface fluorination; SDBD; discharge characteristic; multi-layered polyimide

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Bian, D.; Wu, Y. Enduring and Stable Surface Dielectric Barrier Discharge (SDBD) Plasma Using Fluorinated Multi-Layered Polyimide. Polymers 2018, 10, 606.

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