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Journal: Crystals, 2024
Volume: 14
Number: 821
Article:
Study on the Simulation and Experimental Impact of Substrate Holder Design on 3-Inch High-Quality Polycrystalline Diamond Thin Film Growth in a 2.45 GHz Resonant Cavity MPCVD
Authors:
by
Shuai Wu, Kesheng Guo, Jie Bai, Jiafeng Li, Jingming Zhu, Lei Liu, Lei Huang, Chuandong Zhang and Qiang Wang
Link:
https://www.mdpi.com/2073-4352/14/9/821
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