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Journal: MicromachinesVolume: 14Number: 895
Article: Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology
  • Authors:
  • Danil Naumenko,
  • Alexey Tkachenko* and
  • Igor Lysenko
  • et al.
Link: https://www.mdpi.com/2072-666X/14/4/895

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