Demonstration of a Robust All-Silicon-Carbide Intracortical Neural Interface
Abstract
:1. Introduction
2. Materials and Methods
2.1. All-SiC Device Fabrication Process
2.2. All-SiC Evaluation Devices
2.3. SiC Doping and PN Isolation Evaluation
2.4. Electrochemical Characterization of 4H-SiC Material
3. Results
3.1. Device Characterization
3.2. Electrochemical Characterization
4. Discussion
5. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Cathodic | Anodic | |||||||
---|---|---|---|---|---|---|---|---|
Electrode Area (µm2) | Charge Storage Capacity (mC/cm2) | Charge Per Phase (nC) | Charge Storage Capacity (mC/cm2) | Charge Per Phase (nC) | ||||
−0.6 to 0.8 V | −2.0 to 2.8 V | −0.6 to 0.8 V | −2.0 to 2.8 V | −0.6 to 0.8 V | −2.0 to 2.8 V | −0.6 to 0.8 V | −2.0 to 2.8 V | |
502,651 | 4.38 × 10−3 (1.24 × 10−4) | 8.00 × 10−2 (0.644) | 22 (0.625) | 380 (0.642) | 3.70 × 10−3 (4.81 × 10−5) | 0.257 (0.52) | 18.4 (0.242) | 1340 (0.520) |
125,663 | 1.18 × 10−2 (1.42 × 10−3) | 8.61 × 10−2 (1.60 × 10−2) | 14.8 (1.78) | 108 (20.1) | 7.02 × 10−3 (2.9 × 10−4) | 0.115 (2.28 × 10−2) | 8.82 (0.369) | 144 (28.7) |
7854 | 2.98 × 10−2 (2.60 × 10−3) | 1.01 (0.185) | 2.34 (0.204) | 79.5 (14.5) | 6.22 × 10−2 (3.10 × 10−3) | 1.29 (0.113) | 4.89 (0.244) | 102 (8.87) |
1964 | 6.46 × 10−2 (2.07 × 10−3) | 1.51 (0.167) | 1.27 (4.06 × 10−2) | 29.6 (3.27) | 0.177 (9.22 × 10−3) | 1.37 (0.187) | 3.48 (0.181) | 27 (3.66) |
491 | 0.194 (5.67 × 10−3) | 5.53 (1.38) | 0.953 (2.78 × 10−2) | 30.4 (6.63) | 0.406 (2.22 × 10−2) | 5.42 (0.666) | 2.00 (0.109) | 41.7 (3.81) |
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Bernardin, E.K.; Frewin, C.L.; Everly, R.; Ul Hassan, J.; Saddow, S.E. Demonstration of a Robust All-Silicon-Carbide Intracortical Neural Interface. Micromachines 2018, 9, 412. https://doi.org/10.3390/mi9080412
Bernardin EK, Frewin CL, Everly R, Ul Hassan J, Saddow SE. Demonstration of a Robust All-Silicon-Carbide Intracortical Neural Interface. Micromachines. 2018; 9(8):412. https://doi.org/10.3390/mi9080412
Chicago/Turabian StyleBernardin, Evans K., Christopher L. Frewin, Richard Everly, Jawad Ul Hassan, and Stephen E. Saddow. 2018. "Demonstration of a Robust All-Silicon-Carbide Intracortical Neural Interface" Micromachines 9, no. 8: 412. https://doi.org/10.3390/mi9080412