Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors
AbstractPolymer Micro ElectroMechanical Systems (MEMS) have the potential to constitute a powerful alternative to silicon-based MEMS devices for sensing applications. Although the use of commercial photoresists as structural material in polymer MEMS has been widely reported, the integration of functional polymer materials as electromechanical transducers has not yet received the same amount of interest. In this context, we report on the design and fabrication of different electromechanical schemes based on polymeric materials ensuring different transduction functions. Piezoresistive transduction made of carbon nanotube-based nanocomposites with a gauge factor of 200 was embedded within U-shaped polymeric cantilevers operating either in static or dynamic modes. Flexible resonators with integrated piezoelectric transduction were also realized and used as efficient viscosity sensors. Finally, piezoelectric-based organic field effect transistor (OFET) electromechanical transduction exhibiting a record sensitivity of over 600 was integrated into polymer cantilevers and used as highly sensitive strain and humidity sensors. Such advances in integrated electromechanical transduction schemes should favor the development of novel all-polymer MEMS devices for flexible and wearable applications in the future. View Full-Text
Share & Cite This Article
Thuau, D.; Ducrot, P.-H.; Poulin, P.; Dufour, I.; Ayela, C. Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors. Micromachines 2018, 9, 197.
Thuau D, Ducrot P-H, Poulin P, Dufour I, Ayela C. Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors. Micromachines. 2018; 9(5):197.Chicago/Turabian Style
Thuau, Damien; Ducrot, Pierre-Henri; Poulin, Philippe; Dufour, Isabelle; Ayela, Cédric. 2018. "Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors." Micromachines 9, no. 5: 197.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.