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Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors

1
Laboratoire IMS, University Bordeaux, UMR 5218, ENSCBP, 16 Avenue Pey Berland, 33607 Pessac Cedex, France
2
Centre de Recherche Paul Pascal, University Bordeaux, Avenue Schweitzer, 33600 Pessac, France
*
Author to whom correspondence should be addressed.
Micromachines 2018, 9(5), 197; https://doi.org/10.3390/mi9050197
Received: 9 February 2018 / Revised: 13 April 2018 / Accepted: 16 April 2018 / Published: 24 April 2018
(This article belongs to the Special Issue Polymer Based MEMS and Microfabrication)
Polymer Micro ElectroMechanical Systems (MEMS) have the potential to constitute a powerful alternative to silicon-based MEMS devices for sensing applications. Although the use of commercial photoresists as structural material in polymer MEMS has been widely reported, the integration of functional polymer materials as electromechanical transducers has not yet received the same amount of interest. In this context, we report on the design and fabrication of different electromechanical schemes based on polymeric materials ensuring different transduction functions. Piezoresistive transduction made of carbon nanotube-based nanocomposites with a gauge factor of 200 was embedded within U-shaped polymeric cantilevers operating either in static or dynamic modes. Flexible resonators with integrated piezoelectric transduction were also realized and used as efficient viscosity sensors. Finally, piezoelectric-based organic field effect transistor (OFET) electromechanical transduction exhibiting a record sensitivity of over 600 was integrated into polymer cantilevers and used as highly sensitive strain and humidity sensors. Such advances in integrated electromechanical transduction schemes should favor the development of novel all-polymer MEMS devices for flexible and wearable applications in the future. View Full-Text
Keywords: electromechanical transduction; polymer MEMS; piezoresistivity; piezoelectricity; Piezo-organic field effect transistor electromechanical transduction; polymer MEMS; piezoresistivity; piezoelectricity; Piezo-organic field effect transistor
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MDPI and ACS Style

Thuau, D.; Ducrot, P.-H.; Poulin, P.; Dufour, I.; Ayela, C. Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors. Micromachines 2018, 9, 197.

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