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Journal: Micromachines, 2018
Volume: 9
Number: 178

Article: Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films
Authors: by Sen Li, Xiaofeng Zhao, Yinan Bai, Yi Li, Chunpeng Ai and Dianzhong Wen
Link: https://www.mdpi.com/2072-666X/9/4/178

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