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Journal: Micromachines, 2018
Volume: 9
Number: 166
Article:
Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing
Authors:
by
Mingxing Yu, Pin Lv, Tiantong Xu, Xiao Tan and Haiwang Li
Link:
https://www.mdpi.com/2072-666X/9/4/166
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