Yu, M.; Lv, P.; Xu, T.; Tan, X.; Li, H.
Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing. Micromachines 2018, 9, 166.
https://doi.org/10.3390/mi9040166
AMA Style
Yu M, Lv P, Xu T, Tan X, Li H.
Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing. Micromachines. 2018; 9(4):166.
https://doi.org/10.3390/mi9040166
Chicago/Turabian Style
Yu, Mingxing, Pin Lv, Tiantong Xu, Xiao Tan, and Haiwang Li.
2018. "Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing" Micromachines 9, no. 4: 166.
https://doi.org/10.3390/mi9040166
APA Style
Yu, M., Lv, P., Xu, T., Tan, X., & Li, H.
(2018). Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing. Micromachines, 9(4), 166.
https://doi.org/10.3390/mi9040166