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The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing

1,2, 1,2,*, 1,2, 1,2 and 1,2
Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, China
School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China
Author to whom correspondence should be addressed.
Micromachines 2018, 9(2), 55;
Received: 15 January 2018 / Revised: 28 January 2018 / Accepted: 29 January 2018 / Published: 31 January 2018
PDF [13805 KB, uploaded 31 January 2018]


The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 s on the UFG LZ91 Mg-Li alloy. The surface topography indicates that embossed micro-channels for UFG LZ91 Mg-Li with all widths are clearly printed well with good geometrical transferability and no obvious defects. The comparison filling behavior of UFG and the CG LZ91 Mg-Li alloy reveals that grain sizes mainly affect the filling quality of micro-embossing. The results indicate a potential application of the UFG Mg-Li alloy in the mass fabrication of micro-electro-mechanical system (MEMS) components. View Full-Text
Keywords: micro-embossing; ultrafine grains; micro-array channels; Mg-Li alloy micro-embossing; ultrafine grains; micro-array channels; Mg-Li alloy

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Su, Q.; Xu, J.; Wang, C.; Shan, D.; Guo, B. The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing. Micromachines 2018, 9, 55.

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