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Micromachines 2018, 9(2), 55; https://doi.org/10.3390/mi9020055

The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing

1,2
,
1,2,* , 1,2
,
1,2
and
1,2
1
Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, China
2
School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China
*
Author to whom correspondence should be addressed.
Received: 15 January 2018 / Revised: 28 January 2018 / Accepted: 29 January 2018 / Published: 31 January 2018
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Abstract

The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 s on the UFG LZ91 Mg-Li alloy. The surface topography indicates that embossed micro-channels for UFG LZ91 Mg-Li with all widths are clearly printed well with good geometrical transferability and no obvious defects. The comparison filling behavior of UFG and the CG LZ91 Mg-Li alloy reveals that grain sizes mainly affect the filling quality of micro-embossing. The results indicate a potential application of the UFG Mg-Li alloy in the mass fabrication of micro-electro-mechanical system (MEMS) components. View Full-Text
Keywords: micro-embossing; ultrafine grains; micro-array channels; Mg-Li alloy micro-embossing; ultrafine grains; micro-array channels; Mg-Li alloy
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Su, Q.; Xu, J.; Wang, C.; Shan, D.; Guo, B. The Fabrication of Micro-Array Channels with the Ultrafine-Grained LZ91 Mg-Li Alloy by Micro-Embossing. Micromachines 2018, 9, 55.

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