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Journal: Micromachines, 2018
Volume: 9
Number: 490

Article: Development and Characterization of Non-Evaporable Getter Thin Films with Ru Seeding Layer for MEMS Applications
Authors: by El-Mostafa Bourim, Hee Yeoun Kim and Nak-Kwan Chung
Link: https://www.mdpi.com/2072-666X/9/10/490

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