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Journal: Micromachines, 2018
Volume: 9
Number: 25
Article:
Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator
Authors:
by
Xin Zhou, Dingbang Xiao, Qingsong Li, Qian Hu, Zhanqiang Hou, Kaixuan He, Zhihua Chen, Chun Zhao, Yulie Wu, Xuezhong Wu and Ashwin Seshia
Link:
https://www.mdpi.com/2072-666X/9/1/25
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