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Journal: Micromachines, 2017
Volume: 8
Number: 81

Article: Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam
Authors: by Lili Gao, Zai-Fa Zhou and Qing-An Huang
Link: https://www.mdpi.com/2072-666X/8/3/81

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