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Micromachines 2017, 8(2), 50;

The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization

Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
University of Chinese Academy of Sciences, Beijing 100049, China
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
Authors to whom correspondence should be addressed.
Academic Editors: Hans Nørgaard Hansen and Guido Tosello
Received: 4 January 2017 / Revised: 6 February 2017 / Accepted: 8 February 2017 / Published: 13 February 2017
(This article belongs to the Special Issue Micro/Nano Manufacturing)
Full-Text   |   PDF [4722 KB, uploaded 13 February 2017]   |  


Microlens arrays (MLAs) are key optical components in laser beam homogenization. However, due to imperfect surface profiles resulting from microfabrication, the functionalities of MLAs in beam modulation could be compromised to some extent. In order to address this issue, the effects of surface profile mismatches between ideal and fabricated MLAs on beam homogenization were analyzed. Four types of surface profile errors of MLAs were modeled theoretically and numerical simulations were conducted to quantitatively estimate the effects of these profile errors on beam homogenization. In addition, experiments were conducted to validate the simulation results, revealing that profile errors leading to optical deviations located on the apex of microlenses affected beam homogenization less than deviations located further away from it. This study can provide references for the further applications of MLAs in beam homogenization. View Full-Text
Keywords: microlens array; beam homogenization; surface profile error; microfabrication microlens array; beam homogenization; surface profile error; microfabrication

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Cao, A.; Pang, H.; Wang, J.; Zhang, M.; Chen, J.; Shi, L.; Deng, Q.; Hu, S. The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization. Micromachines 2017, 8, 50.

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