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Micromachines 2017, 8(2), 32;

Dynamics of Microbeams under Multi-Frequency Excitations

Mechanical Engineering Department, The State University of New York at Binghamton, 4400 Vestal Parkway E., Binghamton, NY 13902, USA
Physical Sciences and Engineering (PSE), King Abdullah University of Science and Technology, 23955-6900 Thuwal, Saudi Arabia
Department of Aeronautical Engineering, Annasaheb Dange College of Engineering and Technology, Sangli, Maharashtra 416301, India
Author to whom correspondence should be addressed.
Academic Editors: Stefano Mariani and Nam-Trung Nguyen
Received: 23 November 2016 / Revised: 27 December 2016 / Accepted: 16 January 2017 / Published: 24 January 2017
PDF [4571 KB, uploaded 24 January 2017]


This paper presents an investigation of the dynamics of microbeams under multiple harmonic electrostatic excitation frequencies. First, the response of a cantilever microbeam to two alternating current (AC) source excitation is examined. We show by simulations the response of the microbeam at primary resonance (near the fundamental natural frequency) and at secondary resonances (near half, superharmonic, and twice, subharmonic, the fundamental natural frequency). A multimode Galerkin method combined with the Euler-Bernoulli beam equation, accounting for the nonlinear electrostatic force, has been used to develop a reduced order model. The response of the cantilever microbeam to three AC source excitation is also investigated and shown as a promising technique to enhance the bandwidth of resonators. Finally, an experimental study of a clamped-clamped microbeam is conducted, demonstrating the multi-frequency excitation resonances using two, three, and four AC sources. View Full-Text
Keywords: multi-frequency; secondary resonances; superharmonic; electrostatic multi-frequency; secondary resonances; superharmonic; electrostatic

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Ibrahim, A.; Jaber, N.; Chandran, A.; Thirupathi, M.; Younis, M. Dynamics of Microbeams under Multi-Frequency Excitations. Micromachines 2017, 8, 32.

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