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Micromachines 2017, 8(12), 342;

Micromachined Resonant Frequency Tuning Unit for Torsional Resonator

School of Mechanical Engineering, Yonsei University, 50 Yonsei-ro, Seoul 03722, Korea
Present address: Department of Ophthalmology, Henry Ford Health System, Detroit, MI 48202, USA.
Present address: Korea Institute of Industrial Technology (KITECH), 143 Hanggaul-ro, Ansan 15588, Korea.
Author to whom correspondence should be addressed.
Received: 22 October 2017 / Revised: 5 November 2017 / Accepted: 22 November 2017 / Published: 25 November 2017
(This article belongs to the Special Issue Micro-Resonators: The Quest for Superior Performance)
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Achieving the desired resonant frequency of resonators has been an important issue, since it determines their performance. This paper presents the design and analysis of two concepts for the resonant frequency tuning of resonators. The proposed methods are based on the stiffness alteration of the springs by geometrical modification (shaft-widening) or by mechanical restriction (shaft-holding) using micromachined frequency tuning units. Our designs have advantages in (1) reversible and repetitive tuning; (2) decoupled control over the amplitude of the resonator and the tuning ratio; and (3) a wide range of applications including torsional resonators. The ability to tune the frequency by both methods is predicted by finite element analysis (FEA) and experimentally verified on a torsional resonator driven by an electrostatic actuator. The tuning units and resonators are fabricated on a double silicon-on-insulator (DSOI) wafer to electrically insulate the resonator from the tuning units. The shaft-widening type and shaft-holding type exhibit a maximum tuning ratio of 5.29% and 10.7%, respectively. View Full-Text
Keywords: resonant frequency tuning; shaft-widening; shaft-holding; torsional resonator resonant frequency tuning; shaft-widening; shaft-holding; torsional resonator

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Lee, J.-I.; Jeong, B.; Park, S.; Eun, Y.; Kim, J. Micromachined Resonant Frequency Tuning Unit for Torsional Resonator. Micromachines 2017, 8, 342.

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