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Open AccessArticle

An Enhanced Robust Control Algorithm Based on CNF and ISM for the MEMS Micromirror against Input Saturation and Disturbance

1
College of Automation Science and Engineering, South China University of Technology, Guangzhou 510000, China
2
Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada
*
Author to whom correspondence should be addressed.
Micromachines 2017, 8(11), 326; https://doi.org/10.3390/mi8110326
Received: 14 September 2017 / Revised: 24 October 2017 / Accepted: 2 November 2017 / Published: 3 November 2017
(This article belongs to the Special Issue MEMS Mirrors)
Input saturation is a widespread phenomenon in the field of instrumentation, and is harmful to performance and robustness. In this paper, a control design framework based on composite nonlinear feedback (CNF) and integral sliding mode (ISM) technique is proposed for a MEMS micromirror to improve its performance under input saturation. To make the framework more effective, some essential improvements are supplied. With the application of the proposed design framework, the micromirror under input saturation and time-varying disturbances can achieve precise positioning with satisfactory transient performance compared with the open-loop performance. View Full-Text
Keywords: micromirror; input saturation; disturbance rejection; composite nonlinear feedback; integral sliding mode micromirror; input saturation; disturbance rejection; composite nonlinear feedback; integral sliding mode
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MDPI and ACS Style

Tan, J.; Sun, W.; Yeow, J.T.W. An Enhanced Robust Control Algorithm Based on CNF and ISM for the MEMS Micromirror against Input Saturation and Disturbance. Micromachines 2017, 8, 326. https://doi.org/10.3390/mi8110326

AMA Style

Tan J, Sun W, Yeow JTW. An Enhanced Robust Control Algorithm Based on CNF and ISM for the MEMS Micromirror against Input Saturation and Disturbance. Micromachines. 2017; 8(11):326. https://doi.org/10.3390/mi8110326

Chicago/Turabian Style

Tan, Jiazheng; Sun, Weijie; Yeow, John T.W. 2017. "An Enhanced Robust Control Algorithm Based on CNF and ISM for the MEMS Micromirror against Input Saturation and Disturbance" Micromachines 8, no. 11: 326. https://doi.org/10.3390/mi8110326

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