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Journal: Micromachines, 2017
Volume: 8
Number: 304
Article:
A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines
Authors:
by
Huan Liu, Zhongliang Yu, Yan Liu and Xudong Fang
Link:
https://www.mdpi.com/2072-666X/8/10/304
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