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Micromachines 2017, 8(1), 2;

MEMS Gyroscopes Based on Acoustic Sagnac Effect

State Key Laboratory of Precision Measurement Technology and Instruments, School of Precision Instruments and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
Intel Labs, San Francisco, CA 95054, USA
This paper is an extended version of our paper published in the 14th IEEE SENSORS Conference, Busan, Korea, 1–4 November 2015.
Author to whom correspondence should be addressed.
Academic Editors: Ulrich Schmid, Michael Schneider and Nam-Trung Nguyen
Received: 31 October 2016 / Revised: 29 November 2016 / Accepted: 19 December 2016 / Published: 24 December 2016
(This article belongs to the Special Issue Piezoelectric MEMS)
Full-Text   |   PDF [5536 KB, uploaded 24 December 2016]   |  


This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS) device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase difference between two sound waves traveling in opposite directions, and correlates the signal to the angular velocity of the hosting frame. As sound travels significantly slower than light and develops a larger phase change within the same path length, the acoustic gyro can potentially outperform fiber-optic gyros in sensitivity and form factor. It also promises superior stability compared to vibratory MEMS gyros as the design contains no moving parts and is largely insensitive to mechanical stress or temperature. We have carried out systematic simulations and experiments, and developed a series of processes and design rules to implement the device. View Full-Text
Keywords: acoustic gyroscope; Sagnac effect; phase difference; sound waves; angular velocity; sensitivity acoustic gyroscope; Sagnac effect; phase difference; sound waves; angular velocity; sensitivity

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Yu, Y.; Luo, H.; Chen, B.; Tao, J.; Feng, Z.; Zhang, H.; Guo, W.; Zhang, D. MEMS Gyroscopes Based on Acoustic Sagnac Effect. Micromachines 2017, 8, 2.

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