Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch
Abstract
:1. Introduction
2. Experimental Details
2.1. Switch Fabrication
2.2. Device Characterization
3. Results and Discussions
3.1. Double-Clamped Beam Switch
3.2. Cantilever-Type Switch
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Sun, J.; Muruganathan, M.; Kanetake, N.; Mizuta, H. Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch. Micromachines 2016, 7, 124. https://doi.org/10.3390/mi7070124
Sun J, Muruganathan M, Kanetake N, Mizuta H. Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch. Micromachines. 2016; 7(7):124. https://doi.org/10.3390/mi7070124
Chicago/Turabian StyleSun, Jian, Manoharan Muruganathan, Nozomu Kanetake, and Hiroshi Mizuta. 2016. "Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch" Micromachines 7, no. 7: 124. https://doi.org/10.3390/mi7070124