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Micromachines 2016, 7(7), 124;

Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch

School of Material Science, Japan Advanced Institute of Science and Technology, Nomi 923-1211, Japan
Advanced Device Laboratory, RIKEN, Wako 351-0198, Japan
Nanoelectronics and Nanotechnologies Research Group, Faculty of Physical Sciences and Engineering, University of Southampton, High Field, Southampton SO17 1BJ, UK
Authors to whom correspondence should be addressed.
Academic Editor: Nam-Trung Nguyen
Received: 31 May 2016 / Revised: 29 June 2016 / Accepted: 14 July 2016 / Published: 19 July 2016
(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)
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The graphene nano-electro-mechanical switches are promising components due to their outstanding switching performance. However, most of the reported devices suffered from a large actuation voltages, hindering them from the integration in the conventional complementary metal-oxide-semiconductor (CMOS) circuit. In this work, we demonstrated the graphene nano-electro-mechanical switches with the local actuation electrode via conventional nanofabrication techniques. Both cantilever-type and double-clamped beam switches were fabricated. These devices exhibited the sharp switching, reversible operation cycles, high on/off ratio, and a low actuation voltage of below 5 V, which were compatible with the CMOS circuit requirements. View Full-Text
Keywords: graphene; nano-electro-mechanical system; nano-electro-mechanical switch; nanofabrication graphene; nano-electro-mechanical system; nano-electro-mechanical switch; nanofabrication

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Sun, J.; Muruganathan, M.; Kanetake, N.; Mizuta, H. Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch. Micromachines 2016, 7, 124.

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