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Journal: Micromachines, 2016
Volume: 7
Number: 19

Article: Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution
Authors: by Han Lu, Hua Zhang, Mingliang Jin, Tao He, Guofu Zhou and Lingling Shui
Link: https://www.mdpi.com/2072-666X/7/2/19

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