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Journal: Micromachines, 2016
Volume: 7
Number: 19
Article:
Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution
Authors:
by
Han Lu, Hua Zhang, Mingliang Jin, Tao He, Guofu Zhou and Lingling Shui
Link:
https://www.mdpi.com/2072-666X/7/2/19
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