Lu, H.; Zhang, H.; Jin, M.; He, T.; Zhou, G.; Shui, L.
Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution. Micromachines 2016, 7, 19.
https://doi.org/10.3390/mi7020019
AMA Style
Lu H, Zhang H, Jin M, He T, Zhou G, Shui L.
Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution. Micromachines. 2016; 7(2):19.
https://doi.org/10.3390/mi7020019
Chicago/Turabian Style
Lu, Han, Hua Zhang, Mingliang Jin, Tao He, Guofu Zhou, and Lingling Shui.
2016. "Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution" Micromachines 7, no. 2: 19.
https://doi.org/10.3390/mi7020019
APA Style
Lu, H., Zhang, H., Jin, M., He, T., Zhou, G., & Shui, L.
(2016). Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution. Micromachines, 7(2), 19.
https://doi.org/10.3390/mi7020019