On-Chip Method to Measure Mechanical Characteristics of a Single Cell by Using Moiré Fringe
Abstract
:1. Introduction
2. System Architecture for the Measurement of Cellular Mechanical Characteristics
2.1. Overview of the On-Chip Cellular Measurement System
2.2. Fabrication Process of the Robot Integrated Microfluidic Chip
- (1)
- The clearance patterns are fabricated with PMER (Tokyo Ohka Co., Ltd., Tokyo, Japan).
- (2)
- The clearance is formed using reactive ion etching (RIE).
- (3)
- The sacrifice layer for the bonding process is deposited by chrome sputtering.
- (4)
- The shape of the glass layers is patterned with NCM-250 (Nichigo Morton Co., Ltd., Gifu, Japan).
- (5)
- The shape of the glass layers is formed by sandblasting.
- (1)
- The patterns of the device layer are fabricated with SU-8 (Nihon Kayaku Sangyo Co. Ltd, Gumma, Japan).
- (2)
- The shapes of the device are formed using deep-RIE. In this process, we fabricated grating structures onto the probe. Figure 2b is the scanning electron microscope (SEM) image of the fabricated grating structure. This is key to accurate measurement, as stated in the following section.
- (3)
- The bottom cover glass is bonded with the device layer using anodic bonding.
- (4)
- The patterns of the handling layer are fabricated with SU-8.
- (5)
- The connecting point to the actuator and frame of the chip are formed by using deep-RIE.
- (6)
- The exposed insulator layer is etched with HF solution.
- (7)
- The top cover glass is bonded by using anodic bonding. In this step, the device layer is connected to the ground via some holes on the bottom glass layer. The holes are buried with silver paste for the wiring.
- (8)
- The sacrificial chrome layers are removed by chrome etchant.
3. Improvement of the Sensing Precision and Accuracy
3.1. Technological Challenges for Improving Sensing Accuracy
3.2. High-Resolution Sensing Method Using Phase Detection with Moiré Fringe
3.3. Calibration of the Force Sensor
4. Experiment and Result
4.1. Performance of the Method
4.2. Cellular Characterization
5. Discussion
6. Conclusions
Acknowledgments
Author Contributions
Supplementary Materials
Conflicts of Interest
References
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Sugiura, H.; Sakuma, S.; Kaneko, M.; Arai, F. On-Chip Method to Measure Mechanical Characteristics of a Single Cell by Using Moiré Fringe. Micromachines 2015, 6, 660-673. https://doi.org/10.3390/mi6060660
Sugiura H, Sakuma S, Kaneko M, Arai F. On-Chip Method to Measure Mechanical Characteristics of a Single Cell by Using Moiré Fringe. Micromachines. 2015; 6(6):660-673. https://doi.org/10.3390/mi6060660
Chicago/Turabian StyleSugiura, Hirotaka, Shinya Sakuma, Makoto Kaneko, and Fumihito Arai. 2015. "On-Chip Method to Measure Mechanical Characteristics of a Single Cell by Using Moiré Fringe" Micromachines 6, no. 6: 660-673. https://doi.org/10.3390/mi6060660