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Journal: Micromachines, 2014
Volume: 5
Number: 697

Article: Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching
Authors: by Viktor Tielen and Yves Bellouard
Link: https://www.mdpi.com/2072-666X/5/3/697

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