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Journal: Micromachines, 2026
Volume: 17
Number: 13
13
Article: Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio
Authors: by Dandan Wang, Cheng Lei, Pengfei Ji, Zhiqiang Li, Renzhi Yuan, Jiangang Yu, Ting Liang, Zong Yao and Jialong Li
Link: https://www.mdpi.com/2072-666X/17/1/13

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