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Journal: Micromachines, 2025
Volume: 16
Number: 954

Article: Structural and Electrically Conductive Properties of Plasma-Enhanced Chemical-Vapor-Deposited High-Resistivity Zn-Doped β-Ga2O3 Thin Films
Authors: by Leonid A. Mochalov, Sergey V. Telegin, Aleksei V. Almaev, Ekaterina A. Slapovskaya and Pavel A. Yunin
Link: https://www.mdpi.com/2072-666X/16/8/954

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