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Journal: Micromachines, 2025
Volume: 16
Number: 609

Article: An Adaptive Three-Dimensional Self-Masking Strategy for the Micro-Fabrication of Quartz-MEMS with Out-of-Plane Vibration Units
Authors: by Yide Dong, Chunyan Yin, Guangbin Dou and Litao Sun
Link: https://www.mdpi.com/2072-666X/16/6/609

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