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Journal: Micromachines, 2025
Volume: 16
Number: 516
516
Article: Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology
Authors: by Fengchao Li, Shijin Yan, Cheng Lei, Dandan Wang, Xi Wei, Jiangang Yu, Yongwei Li, Pengfei Ji, Qiulin Tan and Ting Liang
Link: https://www.mdpi.com/2072-666X/16/5/516

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