Li, F.; Yan, S.; Lei, C.; Wang, D.; Wei, X.; Yu, J.; Li, Y.; Ji, P.; Tan, Q.; Liang, T.
Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology. Micromachines 2025, 16, 516.
https://doi.org/10.3390/mi16050516
AMA Style
Li F, Yan S, Lei C, Wang D, Wei X, Yu J, Li Y, Ji P, Tan Q, Liang T.
Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology. Micromachines. 2025; 16(5):516.
https://doi.org/10.3390/mi16050516
Chicago/Turabian Style
Li, Fengchao, Shijin Yan, Cheng Lei, Dandan Wang, Xi Wei, Jiangang Yu, Yongwei Li, Pengfei Ji, Qiulin Tan, and Ting Liang.
2025. "Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology" Micromachines 16, no. 5: 516.
https://doi.org/10.3390/mi16050516
APA Style
Li, F., Yan, S., Lei, C., Wang, D., Wei, X., Yu, J., Li, Y., Ji, P., Tan, Q., & Liang, T.
(2025). Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology. Micromachines, 16(5), 516.
https://doi.org/10.3390/mi16050516
