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Journal: Micromachines, 2025
Volume: 16
Number: 198
Article:
Research on Deflection and Stress Analyses and the Improvement of the Removal Uniformity of Silicon in a Single-Sided Polishing Machine Under Pressure
Authors:
by
Guoqing Ye and Zhenqiang Yao
Link:
https://www.mdpi.com/2072-666X/16/2/198
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