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Journal: Micromachines, 2025
Volume: 16
Number: 168
168
Article: Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy
Authors: by Philipp Kästner, Basma Elsaka, Mustaqim Siddi Que Iskhandar, Steffen Liebermann, Roland Donatiello, Shujie Liu and Hartmut Hillmer
Link: https://www.mdpi.com/2072-666X/16/2/168

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