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Journal: Micromachines, 2025
Volume: 16
Number: 1280

Article: Design, Fabrication, and Characterization of a Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Cantilever Beam-like Structure with Enhanced SPL for Air Detection Applications
Authors: by Yanyuan Ba, Yiming Li and Yuanhang Zhou
Link: https://www.mdpi.com/2072-666X/16/11/1280

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