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Journal: Micromachines, 2025
Volume: 16
Number: 1154

Article: Analysis of Key Factors Affecting the Sensitivity of Dual-Backplate Capacitive MEMS Microphones
Authors: by Chengpu Sun, Haosheng Liu, Ludi Kang and Bilong Liu
Link: https://www.mdpi.com/2072-666X/16/10/1154

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