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Journal: Micromachines, 2025
Volume: 16
Number: 1141

Article: Molecular Dynamics Study on the Effect of Surface Films on the Nanometric Grinding Mechanism of Single-Crystal Silicon
Authors: by Meng Li, Di Chang, Pengyue Zhao and Jiubin Tan
Link: https://www.mdpi.com/2072-666X/16/10/1141

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