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Journal: Micromachines, 2025
Volume: 16
Number: 1077

Article: Photoelectrochemical Oxidation and Etching Methods Used in Fabrication of GaN-Based Metal-Oxide-Semiconductor High-Electron Mobility Transistors and Integrated Circuits: A Review
Authors: by Ching-Ting Lee and Hsin-Ying Lee
Link: https://www.mdpi.com/2072-666X/16/10/1077

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