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Journal: MicromachinesVolume: 15Number: 1173
Article: A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement
  • Authors:
  • Jiacheng Li1,2,3,4,
  • Rui Feng2 and
  • Xiaoyi Wang1,3,4
  • et al.
Link: https://www.mdpi.com/2072-666X/15/9/1173

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