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Journal: Micromachines, 2024
Volume: 15
Number: 1144
Article:
Integrated Amorphous Carbon Film Temperature Sensor with Silicon Accelerometer into MEMS Sensor
Authors:
by
Qi Zhang, Xiaoya Liang, Wenzhe Bi, Xing Pang and Yulong Zhao
Link:
https://www.mdpi.com/2072-666X/15/9/1144
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