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Journal: MicromachinesVolume: 15Number: 1144
Article: Integrated Amorphous Carbon Film Temperature Sensor with Silicon Accelerometer into MEMS Sensor
  • Authors:
  • Qi Zhang1,
  • Xiaoya Liang1 and
  • Wenzhe Bi1
  • et al.
Link: https://www.mdpi.com/2072-666X/15/9/1144

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