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Journal: Micromachines, 2024
Volume: 15
Number: 1097
Article:
Development of a High-Sensitivity Acoustic Sensor Based on Grating Interferometer Combined with Glass Diaphragm
Authors:
by
Mengying Zhang, Chao Lu, Quanliang Zhao and Zhi-Mei Qi
Link:
https://www.mdpi.com/2072-666X/15/9/1097
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